Browsing by author "Lodha, Jayant K."
Now showing items 1-1 of 1
-
Self-assembled monolayers as inhibitors for area-selective deposition: A novel approach towards resist-less EUV lithography
Lodha, Jayant K.; Pollentier, Ivan; Conard, Thierry; Vallat, Remi; De Gendt, Stefan; Armini, Silvia (2022)