Browsing by author "Kim, Chul Sung"

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Carbon-based thermal stabilization techniques for junction and silicide engineering for high performance CMOS periphery in memory applications

Ortolland, Claude; Mathew, Suraj; Duffy, Ray; Saino, Kanta; Kim, Chul Sung; Mertens, Sofie; Horiguchi, Naoto; Vrancken, Christa; Chiarella, Thomas; Kerner, Christoph; Absil, Philippe; Lauwers, Anne; Biesemans, Serge; Hoffmann, Thomas Y. (2009)
First electrical demonstration of DRAM compatible Ni silicides

Machkaoutsan, Vladimir; Bauer, Matthias; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Kim, Chul Sung; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Granneman, Ernst; Vandervorst, Wilfried; Thomas, Shawn. G (2009)