Browsing by author "Ladas, S."

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High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.; Reading, M.A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009)
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.; Reading, M. A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Fried, M.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009)