Authors

van den Berg, J.A.; Reading, M. A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Fried, M.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan

Conference

Analytical Techniques for Semiconductor Materials and Process Characterization 6

Title

High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

Publication type

Proceedings paper

Embargo date

9999-12-31