Publication:
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1893 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-01-11
Citations
Metrics
Views
1893 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-01-11
Citations