Browsing by author "Shao, Feng"
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Predictive modeling of EUV-lithography: the role of mask, optics, and photoresist effects
Erdmann, Andreas; Shao, Feng; Evanschitzky, Peter; Fuehner, Tim; Lorusso, Gian; Hendrickx, Eric; Goethals, Mieke; Jonckheere, Rik; Bret, Tristan; Hofmann, Thorsten (2011)