Browsing by author "San, Tamer"
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Treshold voltage modulation in FINFET devices through arsenic ion implantation into TiN/HfSiON gate stack
Witters, Liesbeth; Son, Nak Jin; Ferain, Isabelle; San, Tamer; Singanamalla, Raghunath; Kerner, Christoph; Collaert, Nadine; De Meyer, Kristin; Jurczak, Gosia (2007-10)