Authors

Witters, Liesbeth; Son, Nak Jin; Ferain, Isabelle; San, Tamer; Singanamalla, Raghunath; Kerner, Christoph; Collaert, Nadine; De Meyer, Kristin; Jurczak, Gosia

Conference

IEEE International SOI Conference

Title

Treshold voltage modulation in FINFET devices through arsenic ion implantation into TiN/HfSiON gate stack

Publication type

Proceedings paper