Browsing by author "Yoshie, Kimura"

Now showing items 1-1 of 1

    • 15nm HP patterning with EUV lithography and SADP 

      Souriau, Laurent; Hellin, David; Kunnen, Eddy; Versluijs, Janko; Dekkers, Harold; Albert, Johan; Orain, Isabelle; Yoshie, Kimura; Xu, Kaidong; Vertommen, Johan; Wiaux, Vincent; Boullart, Werner (2012)