15nm HP patterning with EUV lithography and SADP

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Authors
Souriau, Laurent; Hellin, David; Kunnen, Eddy; Versluijs, Janko; Dekkers, Harold; Albert, Johan; Orain, Isabelle; Yoshie, Kimura; Xu, Kaidong; Vertommen, Johan; Wiaux, Vincent; Boullart, Werner
Conference
34th International Symposium on Dry Process - DPS
Title
15nm HP patterning with EUV lithography and SADP
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Meeting abstract
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