Publication:

15nm HP patterning with EUV lithography and SADP

Date

2012
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Author(s)

Souriau, Laurent  
;
Hellin, David  
;
Kunnen, Eddy
;
Versluijs, Janko  
;
Dekkers, Harold  
;
Albert, Johan
;
Orain, Isabelle
;
Yoshie, Kimura
;
Xu, Kaidong
;
Vertommen, Johan
;
Wiaux, Vincent  
;
Boullart, Werner  

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