Browsing by author "Möller, W."
Now showing items 1-2 of 2
-
Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Möller, W.; Vandervorst, Wilfried; Gijbels, R. (2004-05) -
Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Ignatova, V.A.; Möller, W.; Conard, Thierry; Vandervorst, Wilfried; Gijbels, R. (2005-02)