Browsing by author "Wu, Aiwen"
Now showing items 1-3 of 3
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Continuous improvements of defectivity rates in immersion photolithography via functionalized membranes in point-of-use photochemical filtration
D'Urzo, Lucia; Bayana, Hareen; Vandereyken, Jelle; Foubert, Philippe; Wu, Aiwen; Jaber, Jad; Hamzik, James (2017) -
Improving EUV underlayer coating defectivity using point-of-use filtration
Wu, Aiwen; Bayana, Hareen; Foubert, Philippe; Chacko, Andrea; Guerrero, Douglas (2020) -
Optimization of Point-Of-Use Filtration for Metal Oxide Photoresist
Wu, Aiwen; Tang, Harvey; Conner, Gregg; Chang, Shu Hao; Giordano, Gaetano; Smiddy, Dominick; Geniza, Mark; Clark, Benjamin L. (2021)