Browsing by author "van der Hoff, Alex"
Now showing items 1-2 of 2
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Image placement error: closing the gap between overlay and imaging
Hendrickx, Eric; Colina, Alberto; van der Hoff, Alex; Finders, Jo; Vandenberghe, Geert (2005) -
Pattern displacement induced by lens aberrations
Hendrickx, Eric; Vandenberghe, Geert; Ronse, Kurt; Colina, Alberto; van der Hoff, Alex; Dusa, Mircea; Finders, Jo (2002)