Browsing by author "Kuppuswamy, Vijaya-Kumar Murugesan"
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Contact edge roughness and CD uniformity in EUV: effect of photo acid generator and sensitizer
Kuppuswamy, Vijaya-Kumar Murugesan; Constantoudis, Vassilios; Gogolides, Evangelos; Vaglio Pret, Alessandro; Gronheid, Roel (2012) -
Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity
Kuppuswamy, Vijaya-Kumar Murugesan; Constantoudis, Vassilios; Gogolides, Evangelos; Gronheid, Roel; Vaglio Pret, Alessandro (2011)