Browsing by author "den Toonder, Jaap M.J."

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Creep as a reliability problem in MEMS

Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Jourdain, Anne; Simons, Veerle; Tilmans, Harrie; den Toonder, Jaap M.J.; Puers, Bob; De Wolf, Ingrid (2004)
Creep characterization of Al alloy thin films for use in MEMS applications

Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Puers, Robert; den Toonder, Jaap M.J.; De Wolf, Ingrid (2004)