Browsing by author "Gan, Nobuko"
Now showing items 1-5 of 5
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Dissolution of germanium in sulfuric acid based solutions
Gan, Nobuko; Ogawa, Yuichi; Nagai, Tatsuo; Masaoka, Toru; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul (2015) -
Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Ogawa, Yuichi; Wostyn, Kurt; Pacco, Antoine; Yoshida, Yukifuni; Holsteyns, Frank (2016) -
Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Iino, Hideaki; Tanaka, Yoichi; Gan, Nobuko; Fukui, Takeo; Akanishi, Yuya; Iwahata, Shota; Oniki, Yusuke; Altamirano Sanchez, Efrain; Holsteyns, Frank (2021) -
Impact of hydrogen peroxide in ultrapure water
Ogawa, Yuichi; Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Minato, Yasuharu; Miyazaki, Yoichi; Wostyn, Kurt; Pacco, Antoine; Holsteyns, Frank; Yoshida, Yukifumi (2017) -
Study of cobalt etch control by pH and oxidizer
Ogawa, Yuichi; Gan, Nobuko; Masaoka, Toru; Yoshimura, Minami; Iino, Hideaki; Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Holsteyns, Frank (2018)