Study of cobalt etch control by pH and oxidizer

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Authors
Ogawa, Yuichi; Gan, Nobuko; Masaoka, Toru; Yoshimura, Minami; Iino, Hideaki; Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Holsteyns, Frank
Conference
Surface Preparation and Cleaning Conference - SPCC
Title
Study of cobalt etch control by pH and oxidizer
Publication type
Meeting abstract
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