Publication:

Study of cobalt etch control by pH and oxidizer

Date

2018

Meeting abstract

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Author(s)

Ogawa, Yuichi

;

Gan, Nobuko

;

Masaoka, Toru

;

Yoshimura, Minami

;

Iino, Hideaki

;

;

;

;

Holsteyns, Frank

Statistics

1933 since deposited on 2021-10-26

Acq. date: 2026-02-25