Browsing by author "Sourty, Erwan"
Now showing items 1-3 of 3
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3D-analysis of semiconductor structures by electron tomography
Bender, Hugo; Richard, Olivier; Kalio, Andre; Sourty, Erwan (2007) -
Automated quantification of dimensions on tomographic reconstructions of semiconductor devices
Kalio, Andre; Richard, Olivier; Sourty, Erwan; Bender, Hugo (2007) -
Tomographic analysis of a FINFET structures
Richard, Olivier; Kalio, Andre; Bender, Hugo; Sourty, Erwan (2007)