Browsing by author "Baylav, Burak"
Now showing items 1-3 of 3
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EUV flare and proximity modeling and model-based correction
Zuniga, Christian D.; Habib, Mohamed; Word, James C.; Lorusso, Gian; Hendrickx, Eric; Baylav, Burak; Chalasani, Raghu; Lam, Michael (2011) -
Mitigating mask roughness via pupil filtering
Baylav, Burak; Maloney, Chris; Levinson, Zac; Bekaert, Joost; Vaglio Pret, Alessandro; Smith, Bruce (2014) -
The impact of pupil plane filtering on mask roughness transfer
Baylav, Burak; Maloney, Chris; Levinson, Zac; Bekaert, Joost; Vaglio Pret, Alessandro; Smith, Bruce W. (2013)