EUV flare and proximity modeling and model-based correction

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Authors
Zuniga, Christian D.; Habib, Mohamed; Word, James C.; Lorusso, Gian; Hendrickx, Eric; Baylav, Burak; Chalasani, Raghu; Lam, Michael
Conference
Extreme Ultraviolet (EUV) Lithography II
Title
EUV flare and proximity modeling and model-based correction
Publication type
Proceedings paper
Embargo date
9999-12-31
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