Browsing by author "Claes, Jesse"
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Copper oxide direct bonding of 200 mm CMOS wafers with five metal levels and TSVs: morphological and electrical characterization
Cavaco, Celso; Peng, Lan; Lavizzari, Simone; Claes, Jesse; Van Hoovels, Nele; Guerrieri, Stefano; Sabuncuoglu Tezcan, Deniz; Osman, Haris (2016)