Browsing by author "Machida, Takahiro"

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Comparison of back side chrome focus monitor to focus self-metrology of an immersion scanner

D'have, Koen; Machida, Takahiro; Laidler, David; Cheng, Shaunee (2007)
Double patterning design split implementation and validation for the 32nm node

Drapeau, Martin; Wiaux, Vincent; Hendrickx, Eric; Verhaegen, Staf; Machida, Takahiro (2007)