Browsing by author "Dierichs, M."
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ArF step-and-scan exposure system for 0.15-μm and 0.13-μm technology nodes
Mulkens, J.; Stoeldraijer, J.; Davies, G.; Dierichs, M.; Heskamp, B.; Moers, M. H.; George, R. A.; Roempp, O.; Glatzel, H.; Wagner, C.; Pollers, Ingrid; Jaenen, Patrick (1999)