Browsing by author "Maes, A."

Now showing items 1-2 of 2

Evaluation of megasonic cleaning processes

Holsteyns, Frank; Riskin, A.; Vereecke, Guy; Maes, A.; Mertens, Paul (2004)
Introduction of high-k materials into wet processing, analysis and behavior

Onsia, Bart; Hellin, David; Claes, Martine; Maes, A.; De Gendt, Stefan; Heyns, Marc (2003)