Browsing by author "Brux, Oliver"

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Integrated cleaning and handling automation of NXE3100 reticles

Jonckheere, Rik; Waehler, Tobias; Baudemprez, Bart; Dietze, Uwe; Dress, Peter; Brux, Oliver; Ronse, Kurt (2012)
Minimizing particle contamination of NXE3100 reticles

Jonckheere, Rik; Baudemprez, Bart; Waehler, Tobias; Van Den Heuvel, Dieter; Schmalfuss, Heiko; Brux, Oliver; Dress, Peter; Kappel, Christophe; Zickler, Leander (2012)