Browsing by author "Naumov, Sergei"
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Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths
Prager, Lutz; Naumov, Sergei; Pistol, L.; Wennrich, L.; Buchmeister, M. R.; Marsik, Premysl; Verdonck, Patrick; Baklanov, Mikhaïl (2008)