Authors

Prager, Lutz; Naumov, Sergei; Pistol, L.; Wennrich, L.; Buchmeister, M. R.; Marsik, Premysl; Verdonck, Patrick; Baklanov, Mikhaïl

Conference

17th Workshop Materials for Advanced Metallization

Title

Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths

Publication type

Meeting abstract