Browsing by author "Schreutelkamp, Robert"
Now showing items 1-2 of 2
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Junction anneal sequence optimization for advanced high-k / metal gate CMOS technology
Ortolland, Claude; Ragnarsson, Lars-Ake; Kerner, Christoph; Chiarella, Thomas; Rosseel, Erik; Okuno, Yasutoshi; Favia, Paola; Richard, Olivier; Everaert, Jean-Luc; Schram, Tom; Kubicek, Stefan; Absil, Philippe; Biesemans, Serge; Schreutelkamp, Robert; Hoffmann, Thomas Y. (2009) -
Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)
Ortolland, Claude; Horiguchi, Naoto; Kerner, Christoph; Chiarella, Thomas; Eyben, Pierre; Everaert, Jean-Luc; Agua Borniquel, Jose; Poon, Tse; Santhanam, Kartik; Porshnev, Peter; Foad, Majeed; Schreutelkamp, Robert; Absil, Philippe; Vandervorst, Wilfried; Felch, Susan; Hoffmann, Thomas Y. (2008)