Browsing by author "Kawaguchi, Mark"

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Integration of a recessed SiGe Source/Drain into a PMOS transistor

Washington, Lori; Nouri, Faran; Verheyen, Peter; De Wolf, Ingrid; Moroz, Victor; Kawaguchi, Mark; Yihwan, Kim; Samoilov, Arkadii; Jurczak, Gosia (2005)