Browsing by author "Saka, N."

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Controlling scratching in Cu Cchemical-mechanical planarization (CuCMP)

Eusner, Thor; Saka, N.; Chun, J-H; Armini, Silvia; Moinpour, M.; Fisher, P. (2008)
Controlling scratching in Cu chemical Journalmechanical planarization

Eusner, T.; Saka, N.; Chun, J.H.; Armini, Silvia; Moinpour, M.; Fischer, P. (2009)