Browsing by author "Scherübl, Thomas"
Now showing items 1-3 of 3
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Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
Philipsen, Vicky; Mesuda, Kei; De Bisschop, Peter; Erdmann, Andreas; Citarella, Giuseppe; Evanschitzky, Peter; Birkner, Robert; Richter, Rigo; Scherübl, Thomas (2007) -
Increasing the predictability of AIMS measurements by coupling to resist simulations
Meliorisz, Balint; Erdmann, Andreas; Schnattinger, Thomas; Strössner, Ulrich; Scherübl, Thomas; De Bisschop, Peter; Philipsen, Vicky (2008) -
Using the AIMS 45-193i for hyper-NA imaging applications
De Bisschop, Peter; Philipsen, Vicky; Birkner, Robert; Buttgereit, Uwe; Richter, Rigo; Scherübl, Thomas (2007)