Browsing by author "Kaku, Mureo"
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High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches
French, Roger H.; Tran, Hoang V.; Adelman, Doug J.; Rogado, Nyrissa S.; Kaku, Mureo; Mocella, Michael; Chen, Charles Y.; Hendrickx, Eric; Van Roey, Frieda; Bernfeld, Adam S.; Derryberry, Rebekah A. (2008)