Publication:
High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches
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1882 since deposited on 2021-10-17
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Acq. date: 2026-08-11
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Statistics
Views
1882 since deposited on 2021-10-17
4last month
1last week
Acq. date: 2026-08-11
Citations