Publication:

High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches

Date

2008

Proceedings Paper

Simple item page Full metadata Statistics

Files

16313.pdf 433.82 KB

Author(s)

French, Roger H.

;

;

Adelman, Doug J.

;

Rogado, Nyrissa S.

;

;

Mocella, Michael

;

Chen, Charles Y.

;

Hendrickx, Eric

;

Van Roey, Frieda

;

Bernfeld, Adam S.

;

Derryberry, Rebekah A.

Metrics

1876 since deposited on 2021-10-17

Acq. date: 2025-12-15