Browsing by author "Liu, Changze"
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Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Rawat, Amita; Bhuwalka, Krishna K.; Matagne, Philippe; Vermeersch, Bjorn; Wu, Hao; Hellings, Geert; Ryckaert, Julien; Liu, Changze (2021)