EISBN
978-1-6654-3748-6
ISSN
1930-8876
Conference
IEEE 51st European Solid-State Device Research Conference (ESSDERC)
Journal
Proceedings of IEEE 51st European Solid-State Device Research Conference (ESSDERC)
Title
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Publication type
Proceedings paper