Browsing by author "Rawat, Amita"
Now showing items 1-4 of 4
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Device Scaling roadmap and its implications for Logic and Analog platform
Spessot, Alessio; Parvais, Bertrand; Rawat, Amita; Miyaguchi, Kenichi; Weckx, Pieter; Jang, Doyoung; Ryckaert, Julien (2020) -
EUV lithography and its enablement of future generations of semiconductor devices
Seong, Nak; Yeon-Hwa, Lim; Chang-Nam, Ahn; Wei-Min, Gao; Jang, Doyoung; Rawat, Amita (2020) -
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Rawat, Amita; Bhuwalka, Krishna; Matagne, Philippe; Vermeersch, Bjorn; Wu, Hao; Hellings, Geert; Ryckaert, Julien; Liu, Changze (2021) -
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Rawat, Amita; Bhuwalka, Krishna K.; Matagne, Philippe; Vermeersch, Bjorn; Wu, Hao; Hellings, Geert; Ryckaert, Julien; Liu, Changze (2021)