EISBN
978-1-6654-3751-6
ISSN
1930-8833
Conference
47th IEEE European Solid State Circuits Conference (ESSCIRC)
Journal
ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)
Title
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Publication type
Proceedings paper