Browsing by author "Capodieci, Luigi"

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Qualification of electrical linewidth measurements (ELM) as a metrology tool for 0.18μm and below

Marschner, Thomas; Pollentier, Ivan; Baerts, Christina; Boltz, Ingo; Ronse, Kurt; Van den hove, Luc; Finders, Jo; Gangala, Hareen K; Capodieci, Luigi (1998)