Browsing by author "Lehnen, P."

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HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?

Conard, Thierry; Chen, Ping; Janssens, Tom; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Mack, P.; Weber, U.; Lehnen, P. (2005)