Browsing by author "Saino, Kanta"
Now showing items 1-2 of 2
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Carbon-based thermal stabilization techniques for junction and silicide engineering for high performance CMOS periphery in memory applications
Ortolland, Claude; Mathew, Suraj; Duffy, Ray; Saino, Kanta; Kim, Chul Sung; Mertens, Sofie; Horiguchi, Naoto; Vrancken, Christa; Chiarella, Thomas; Kerner, Christoph; Absil, Philippe; Lauwers, Anne; Biesemans, Serge; Hoffmann, Thomas Y. (2009) -
Ion-implantation-based low-cost Hk/MG process for CMOS low-power application
Ortolland, Claude; Sahhaf, Sahar; Srividya, Vidya; Degraeve, Robin; Saino, Kanta; Kim, Chul-Sung; Gilbert, Matthieu; Kauerauf, Thomas; Cho, Moon Ju; Dehan, Morin; Schram, Tom; Togo, Mitsuhiro; Horiguchi, Naoto; Groeseneken, Guido; Biesemans, Serge; Absil, Philippe; Vandervorst, Wilfried; Gealy, Dan; Hoffmann, Thomas Y. (2010)