Browsing by author "Bauer, Markus"
Now showing items 1-4 of 4
-
Attenuated phase shift mask for extreme ultraviolet: can they mitigate three-dimensional mask effects?
Erdmann, Andreas; Evanschitzky, Peter; Mesilhy, Hazem; Philipsen, Vicky; Hendrickx, Eric; Bauer, Markus (2018) -
Attenuated PSM for EUV: Can they mitigate 3D mask effects?
Erdmann, Andreas; Evanschitzky, Peter; Mesilhy, Hazem; Philipsen, Vicky; Hendrickx, Eric; Bauer, Markus (2018) -
Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Erdmann, Andreas; Mesilhy, Hazem; Evanschitzky, Peter; Philipsen, Vicky; Timmermans, Frank; Bauer, Markus (2020) -
Perspectives and tradeoffs of novel absorber materials for high NA EUV lithography
Erdmann, Andreas; Mesilhy, Hazem; Evanschitsky, Peter; Philipsen, Vicky; Timmermans, Frank; Bauer, Markus (2020)