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Attenuated phase shift mask for extreme ultraviolet: can they mitigate three-dimensional mask effects?
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1980 since deposited on 2021-10-25
1last week
Acq. date: 2025-10-28
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Metrics
Views
1980 since deposited on 2021-10-25
1last week
Acq. date: 2025-10-28
Citations