Browsing by author "Nielsen, Peter Folmet"
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Systematic study of shallow junction formation on germanium substrates
Hellings, Geert; Rosseel, Erik; Clarysse, Trudo; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmet; Simoen, Eddy; Eneman, Geert; De Jaeger, Brice; Hoffmann, Thomas Y.; De Meyer, Kristin; Vandervorst, Wilfried (2011)