Browsing by author "Moellers, Rudolf"
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A holistic approach of SIMS analysis for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Pirkl, Alexander; Kayser, Sven; Moellers, Rudolf; Conard, Thierry; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Sputtering with large On+ cluster projectiles on inorganic surfaces
Fleischmann, Claudia; Conard, Thierry; Franquet, Alexis; Niehuis, Ewald; Rading, Derk; Moellers, Rudolf; Poleunis, Claude; Delcorte, Arnaud; Vandervorst, Wilfried (2015)