Browsing by author "Juffermans, C."

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Impact of high order aberrations on the performance of the aberration monitor

Dirksen, P.; Juffermans, C.; Engelen, A.; De Bisschop, Peter; Muellerke, H. (2000)
New approach to optical proximity correction

Rosenbusch, A.; Hourd, A.; Juffermans, C.; Kirsch, H.; Lalanne, F.; Maurer, W.; Romeo, C.; Ronse, Kurt; Schiavone, P.; Simecek, M.; Toublan, O.; Watson, J.; Ziegler, W.; Zimmermann, R. (1998)