Browsing by author "Beggiato, Matteo"
Now showing items 1-3 of 3
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300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Moussa, Alain; Bogdanowicz, Janusz; Groven, Benjamin; Morin, Pierre; Beggiato, Matteo; Saib, Mohamed; Santoro, G.; Abramovitz, Y.; Houchens, K.; Ben Nissim, S.; Meir, N.; Hung, J.; Urbanowicz, A.; Koret, R.; Turovets, I.; Lorusso, Gian; Charley, Anne-Laure (2023) -
Advanced high voltage e-beam system combined with an enhanced D2DB for on-device overlay measurement
Kang, Seulki; Maruyama, Kotaro; Yamazaki, Yuichiro; Beggiato, Matteo; Veloso, Anabela; Lorusso, Gian (2023) -
Detection of bonding voids for 3D integration
Chen, Cong; Van den Heuvel, Dieter; Beggiato, Matteo; Tunca Altintas, Bensu; Moussa, Alain; Vandooren, Anne; Baudemprez, Bart; Schobitz, Michael; Khaldi, Wassim; Bogdanowicz, Janusz; Beral, Christophe; Charley, Anne-Laure (2023)