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    • Electrical characterization of InGaAs ultra-shallow junctions 

      Petersen, Dirch H.; Hansen, Ole; Bĝggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2010)