Electrical characterization of InGaAs ultra-shallow junctions

Metadata

Show full item record

Authors

Petersen, Dirch H.; Hansen, Ole; Bĝggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

28

Title

Electrical characterization of InGaAs ultra-shallow junctions

Publication type

Journal article

Collections

Articles