Publication:

Electrical characterization of InGaAs ultra-shallow junctions

Date

2010

Journal article

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Author(s)

Petersen, Dirch H.

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;

Bĝggild, Peter

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;

Nielsen, Peter F.

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;

Adelmann, Christoph

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;

Merckling, Clement

;

;

;

Goossens, Jozefien

;

Vandervorst, Wilfried

;

Clarysse, Trudo

Journal

Journal of Vacuum Science and Technology B

Metrics

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Acq. date: 2025-12-09