Electrical characterization of InGaAs ultra-shallow junctions

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Author(s)

Petersen, Dirch H.

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Bĝggild, Peter

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Nielsen, Peter F.

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Adelmann, Christoph

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Merckling, Clement

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Goossens, Jozefien

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Vandervorst, Wilfried

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Clarysse, Trudo

Journal

Journal of Vacuum Science and Technology B

Metrics

1935 since deposited on 2021-10-18

Acq. date: 2025-10-24